PEO-601
MULTIPURPOSE FAST RAMPING FURNACE
Since 1982 ATV is manufacturing the multipurpose table top fast ramping furnaces PEOs series with single quartz tube. It was initially developed for thick film paste firing. Since that a large variety of new and different processes and applications was and is still being added. ATV applies its PEO series successfully also in semiconductor market segment.
The PEO series is ideal tool for R&D purposes. It can be applied easily for new unique and sophisticated process development as well low to medium volume production applications. This multipurpose furnace has several key aspects integrated and can handle wafers up to 100mm.
Next to floor space saving advantages the PEO also has Zero energy usage in ambient stand-by. Another unique aspect of the system is the multi process capability when using our easy exchangeable Liners. To reach the optimal temperature uniformity ATV uses 14 Kanthal® heating elements which are positioned around, at the front and on back side the process tube and are PID controlled
Facts PEO-601
Technical information and figures
Footprint:
710 x 650 x 450mm (LxWxH)
Weight:
47kg
Inner Quartz tube:
112mm (4-1/2”)
Standard Product Temperature:
1.000°C/1.100°C continuously
Flat Zone:
Up to 40 wafers, 100mm diameter
Power connection:
3Phases, 230/400V, 16A, max.7kW
Common Applications PEO-601
Solid Source Diffusion
Wet/Dry Oxidation
SiAl/SiAu/SiMo alloying
Annealing:
- _Inert/Atmosphere
Polyimide, Curing/Baking
LTCC Sintering, Thick film paste sintering
Features PEO-601
Floor space saving by small foot print
Energy saving by zero at ambient standby
Max 40 wafer/process run
Up to 100mm wafers
Easily exchangeable quartz In Liners
Temperature Ramping:
- Up to 1.000°C within 15 minutes
- Down to < 100°C in less than 60 minutes
- 1K per 100 minutes (slowest ramping speed)
Temperature range 150°C to 1.100°C
Low temperature processing by gas preheating
Ultimate vacuum < 5 x 10-1 mbar
He leak rate: < 5 x 10-8 mbar l/s
O2 < 5 ppm
100 steps/program
Options PEO-601
Additional values
Gas supply safety interface
Vacuum pump
Wafer carriers
Quartz dummy wafer
Quartz In-Liner
DI water bubbler
Vacuum annealing
Additional gas line
High temperature (1100°C)