SP Series classic barrel reactors for isotropic etching, stripping and cleaning for various industries
Unique Specifications
- Convenient loading and unloading of product via file cabinet chamber door
- Optional temperature controlled shelf available
- Many "special" material handlers and fixtures are stock items
- Grounded shelf available for caging (down stream) apps
- All models include 20 processes stored with multi-stepping (parameter change in different places in process)
Features
- Excellent with line ting complex shapes
- Quartz or Pyrex vacuum chamber for ultra clean processing
- 6", 8",10" and 15" chambers suitable for small or large scale production runs
- Many wet chemicals can be eliminated from your process
- Efficient and cost effective ( 6" tool is the most affordable at BSET)
- All systems are easy to use table-top systems
Applications
- Hybrid cleaning
- Asbestos research
- Cleaning of irregular or flat shapes
- Stripping of irregular or flat shapes
- Wafer/card/coupon treatments in boats
- Photo resist stripping
- Dielectric stripping
- Research and development
- Failure analysis
- Plasma process qualification