MEMS (microelectromechanical systems) are microelectronic devices with small movable structures used in everything from projectors to gas sensors and gyroscopes. Over the past few years, these types of device have infiltrated all the nature of electronic devices. Think about the simple act of the screen on your smartphone changing orientation when you move, this was accomplished with a MEMS sensor.
The nature of the internal structure, within the devices, require very sophisticated assembly technics for the device to operate properly. Many times, these devices need to be packaged in a high vacuum environment and the activation of getter materials to maintain vacuum levels.
HIGH VACUUM PACKAGE LID SEALING SYSTEM
THERMAL AND ELECTRICAL GETTER ACTIVATION
ATV’s approach using the Cold Wall Process Chamber is also applied in the SRO-706 Getter system. This system can be applied for Thermal as well for Electrical Getter processes in R&D and Production line applications. The basis for the Getter system is the successful SRO-706 series IR vacuum reflow oven. Common applications are sealing of packages with Kovar caps or optical windows for gyroscopes, microbolometer and various MEMS sensors under high vacuum by applying thermal and/or electrical GETTER activation.
With its proven direct IR heating approach, ATV applies for the SRO-706 Getter system a top and bottom heating. The IR lamp arrays are independently monitored and controlled as 2 separate heating zones. This results that there is an excellent heating uniformity under vacuum when reaching a maximum temperature of 450°C during the Thermal getter process. When the Electrical getter process has applied power of 20W can be achieved per package. In both cases, the sensor or chip temperature remains below 100°C during the getter activation process. Optionally, a mass spectrometer can be added for residual gas analysis during the sealing process
With the special tooling for each different package to be processed a precise package/lid alignment is achieved. Depending on the package size, a load per run can go up to 28 devices. To achieve multiple times higher throughput the getter system can be
integrated into a glovebox system including several baking ovens. When using the glove box option ATV can warrant that the process can be performed in a dry and oxygen-free atmosphere.
The SRO-706 Getter is a result of in-depth cooperation with our customer base and listing to the needs of the market as you may expect form ATV.
ATV has over 40 years of experience in designing, developing equipment and process know-how which underlines our philosophy offering premium equipment and services to the semiconductor and microelectronics industry. Our scientists and support
the team is dedicated to helping our users get the best return from the investment of the ATV equipment.